微纳加工技术_单晶硅制备

傷城~ 2023-01-07 05:54 120阅读 0赞

### 文章目录 ###

*  器件制备主要步骤
 *  单晶，多晶，非晶
 *  单晶硅的介绍
 *  单晶硅的制备
 *  从硅棒到硅片

# 器件制备主要步骤 #

![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70]  
FETMOS 截面图  
![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 1]

# 单晶，多晶，非晶 #

单晶：短程有序，长程有序；  
多晶：短程有序，长程无序；  
非晶：短程无序，长程无序；

# 单晶硅的介绍 #

外貌：  
![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 2]  
晶胞结构：  
![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 3]  
纯度要求 11个9  
![在这里插入图片描述][20210115172200330.png]

# 单晶硅的制备 #

第一步：多晶硅制备  
![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 4]  
第二步 提纯多晶硅  
![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 5]  
第三步 单晶硅制备

共三种方式：  
![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 6]  
CZ法设备图：  
![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 7]  
直拉法：  
![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 8]  
![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 9]  
![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 10]  
![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 11]  
从图可以看出，单晶硅的含杂量随着硅棒生长越来越高；

# 从硅棒到硅片 #

1.  硅棒  
    ![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 12]
2.  切片  
    ![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 13]  
    ![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 14]

![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 15]  
3. 倒角  
![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 16]

1.  磨片  
    ![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 17]

![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 18]

1.  腐蚀  
    ![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 19]
2.  最终抛光  
    ![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 20]
3.  出货![在这里插入图片描述][watermark_type_ZmFuZ3poZW5naGVpdGk_shadow_10_text_aHR0cHM6Ly9ibG9nLmNzZG4ubmV0L3dlaXhpbl80NzEzOTY0OQ_size_16_color_FFFFFF_t_70 21]

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